Plenary Talks

Title: The Challenges From VLT to ELT project in astronomy and from DUV to EUV in lithography optics

Dr. Roland Geyl (France) REOSC Optics Email: roland.geyl@sagem.com

Abstract: The science (or the art) of precision optical component manufacturing and testing and the design of the systems including these components is continuously progressing and is presently pushing hard and moving fast along two directions we want to briefly report in this talk. On one side, astronomy is planning to build soon Extremely Large Telescopes of the 30 to 40-m class based on segmented primary mirror technology and intensive use fo active and adaptive mirror technology. We will report our work done for the 11-m Gran Telescopio Canarias and show first results of latest developments aiming to produce these segments now really faster, cheaper and probably better too. Looking down to the surface of the silicon wafer patterned through lithography process, the semiconductor industry is making gigantic progress on DUV optics operating at 193 nm and providing few 10 nanometers resolution thanks to hyper NA lens design and immersion technology. The next generation of lithograpgy optics is also well maturing presently thanks to the use of mirror systems operating at the soft X wavelength of 13,5 nm. Optical manufacturing and testing art is moving fast again for the production of ultra precise and ultra smooth optical components. Surprizingly, the active optics technology coming from large astronomical mirrors is finding new proof of effectiveness for these type of very challenging optical systems.

Principal Author’s Biography: Roland GEYL graduated from the Ecole Superieure d'Optique in Orsay-France in 1979. He worked in the various domains of lens design for high performance space and defense optics, precision metrology including absolute calibration and precision manufacturing with computer controlled technology of large aspheric optics. His latest work is focused on DUV and EUV optics as well as large segmented optics manufacturing and testing. He holds 10 patents and gave many talks at international symposia. Roland GEYL managed several key space optics and astronomy projects at REOSC, now SAGEM and is now VP Sales and Business Development of the Business Unit. In parallel, Roland GEYL ensurred theoretical and practical lens design courses at the Ecole Superieure d'Optique for nearly 20 years.

Title: Laser Precision Engineering: A Versatile Micro- & Nanomanufacturing Means

Dr. Hong Minghui (Singapore) Department of Electrical & Computer Engineering, National University of Singapore and Data Storage Institute, ASTAR, Singapore

Abstract: Laser precision engineering has unique advantages of being non-contact process, flexible setup and high speed processing in air. In the last decades, we have witnessed its extensive applications in various production lines. Combined with other advanced processing tools, laser nanofabrication will play a much more important role in the next generation manufacturing.

Principal Author’s Biography: Dr. Hong Minghui received his B.S. & M.S. (solar cell fabrication) from Physics Dept., Xiamen Univ., China in 1985 and 1988. After teaching in the Univ. as a lecturer from 1988 to 1994, he continued his higher degree studies in Dept. of Electrical and Computer Engineering (ECE), National University of Singapore (NUS) and obtained his M.E. (laser surface processing & real-time monitoring) in 1996 and Ph.D. in 2000 (laser ablation & real-time monitoring). His research interest includes laser ablation, optical signal diagnostics/process real time monitoring and its industrial applications on laser microprocessing and nanoengineering. He has co-authored 8 book chapters, 23 patents granted, 200+ scientific papers and 25+ keynote/invited talks in the international conferences. He is a member of organizing committees for Laser Precision Micromachining International Conference (2001~2010), International Symposium of Functional Materials (2005 and 2007), Chair of International Workshop of Plasmonics and Applications in Nanotechnologies (2006) and Chair of Conference on Laser Ablation (2009). He was invited to be a peer reviewer of European Science Foundation (2002~2010) projects/workshops. He was invited to serve as an Associated Editor of International Journal of Optomechatronics, an Editor of Journal of Laser Micro/Nanoengineering and a Guest Editor of Applied Physics A. He is Simon Industrial and Professional Fellow in the University of Manchester, UK in the area of laser processing. He won IES Prestigious Engineering Achievement Award 2004, “Laser Microprocessing and Nanofabrication”. Dr. Hong is currently an Associate Professor in ECE Dept, NUS and a Senior Scientist in Data Storage Institute, ASTAR, Singapore.

TITLE: Fabrication of Pt/C Multilayer-Coated Mirrors for Hard X-Ray Telescopes

Dr. Yoshiharu Namba (Japan) Department of Mechanical Engineering, Chubu University E-mail: namba@isc.chubu.ac.jp

Abstract: In future satellite missions for X-ray astronomy, hard X-ray imaging will become one of the major observation techniques. It allows astronomers to observe the distribution of hard X-ray objects in the Universe with a high sensitivity. Since hard X-rays can penetrate thick absorbing materials, astronomers are able to discover many massive black holes embedded in thick gas. High-energy phenomena are well studied in hard X-rays, which are essentially produced by accelerated high-energy particles in the universe. The sixth Japanese X-ray astronomy satellite ASTRO-H to be launched in 2014 is expected to provide the first opportunity to perform hard X-ray imaging observations with a supermirror hard X-ray telescope. This telescope will be constructed with multiple grazing incidence reflecting mirrors of conical shape. The mirrors are fabricated by replication technology from Pt/C multilayer-coated glass tubes of different diameters. The next-generation hard X-ray telescopes after ASTRO-H program require highly nested aspherical thin mirrors of 100 nm shape accuracy and less than 0.3 nm rms surface roughness. Thin mirror substrates or shells consisting of a paraboloid and hyperboloid of revolution are fabricated by replication from molding dies consisting of a paraboloid and hyperboloid of revolution. The ultra-precision molding dies of electroless nickel were single-point diamond turning and ultra-precision polishing.

KEYWORDS: Aspheric Surfaces, Ultra-Precision Molding Dies, Mirror Replication, Single-Point Diamond Turning, Ultra-Precision Polishing

Principal Author’s Biography: Graduated from the department of precision engineering, Osaka University in 1964, Dr. of Engineering from Osaka University in 1970. Associate professor of Osaka University from 1972 to 1987. Professor of Chubu University from 1987. Winner of David Richardson Medal from the Optical Society of America in 1998. Fellow of JSME and JSPE.

Title: Developments in Optical Testing Technology during the Last Decade

Dr. James C. Wyant (USA) College of Optical Sciences, University of Arizona, Tucson, AZ Email: jcwyant@optics.arizona.edu

Abstract: Modern electronics, computers, and software have made it possible to greatly improve the testing of optical components and optical systems and the resulting improvements in the new optical instruments and devices we use are evident. This talk discusses some of these new techniques and in particular the talk will discuss new metrology techniques for evaluating high quality lithographic optics essential for the manufacturing of modern electronics, techniques for the testing of aspheric optics used in most modern optical instruments, special techniques for the evaluation of large astronomical optics, and techniques for performing high quality measurements in less than ideal environments. The impact of these improvements on electronic chips, data storage devices, and various optical instruments will be discussed.

Principal Author’s Biography: James C. Wyant received a B.S. in physics from Case Western Reserve University and M.S. and Ph.D. in optics from the University of Rochester and he is currently Dean and Professor at the College of Optical Sciences at the University of Arizona. Wyant is a member of the National Academy of Engineering and a Fellow of OSA, SPIE, and the Optical Society of India. Wyant was the 1986 president of SPIE and he is the 2010 president of OSA. Wyant has received several awards including the SPIE Gold Medal, the SPIE Technology Achievement Award, the OSA Joseph Fraunhofer Award, and the Optical Society of India Lifetime Achievement Award. In 2008 he received a Doctorado Honoris Causa from the Instituto Nacional de Astrofisica, Optica y Electronica in Puebla, Mexico. He was a founder of the WYKO Corporation and served as its president and board chairman from 1984 to 1997 and he was a founder of the 4D Technology Corporation and currently serves as its board chairman.

Title: IBF-Technology for Nano-Manufacturing Technology

Dr. T. Franz (German) NTG Neue Technologien GmbH & Co. KG

Abstract: Over the last ten years IBF-Technology has been established as a very effective deterministic method to produce ultra-high-precision plane, spherical and aspherical surfaces. The present state of the art is the correction of polishing errors from the long spatial wavelength range from centimeters to meters up to the long spatial wavelength part of the so called mid spatial frequency roughness (MSFR). Whereas in the past the main technology driver has been the semiconductor industry, within the last three years new applications came up due to the fact that specifications for optical equipment were tightened. Very precisely figured surfaces are very important for advanced DUV, EUV and synchrotron optics and for telescope optics for earth and space observation. This led to the development of new types of Ion Beam Figuring plants. The report reflects upon these most efficient systems able to produce high quality optics and mirrors and gives an overview about NTG′s nearly 20 years lasting experience & capabilities in IBF-Technology including an outlook to future projects and R&D-Tasks.

Principal Author’s Biography: Thomas Franz studied mechanical engineering at the Technical University of Darmstadt and gratuated in 1995. For NTG he is working since 1995/06/01. He started as a project engineer in the Design office. During that time he was senior project manager of international projects in Europe, Japan, USA and U.A.E (Dubai). All the time in NTG Th. Franz was involved in IBF related projects. The last project in the Design Office was the realisation of the IBF-100 which was an idea of Dr. Haensel and him. Since 2008/07/01 T. Franz is Chief Technical Officer and Chief Marketing Officer at NTG. His first challenge here was the decision to develop the IBF 1500 plant for mirrors used in astronomical applications. Thomas Franz was born 1967/03/09 and lives in a small village near Gelnhausen, Germany. He is married since 1998 and has three children (Two boys, age 4 & 8; one girl, age 6).

Title: Progress of Chemical Oxygen Iodine Laser

Prof. Fengting Sang (China) Dalian Institute of Chemical Physics, CAS Academician of Chinese Academy of Engineering

Abstract: Since the initial demonstration of chemical oxygen iodine laser (COIL) in 1977. The COIL is well known as a reliable source to produce laser output power up the multi megawatt level. In addition, the high homogeneity of the gain medium provides the near diffraction limited generation of laser radiation. The COIL is a high power, continuous-wave, operating wavelength at 1315 nm which is in the minimum-loss band of the silica optical fiber. Therefore the COIL has a significant future as industrial and military applications. Especially, COIL is one of the most promising candidates for directed energy applications. In the COIL , Researchers have realized that heart of the COIL system is the singlet oxygen generator. Singlet oxygen molecule O2 (1 Δ) is the energy source of COIL. A efficient singlet oxygen generator (SOG) is based on the reaction of basic hydrogen peroxide solution (BHP) with gases chlorine: Cl2 + 2 HO⎯2 → 2 Cl +H2O2 + O2 ( 1 Δ). For this reason the singlet oxygen generator has been the focus of intense research and development efforts over the last 30 years. The iodine is both dissociated and pumped by energy transfer from singlet oxygen O2 (1 Δ). The iodine then lases at 1315nm.Very important parameter of the COIL is the chemical efficiency, ηchem, defined as the number of emitted photons per number of chlorine molecules passed through the O2 (1 Δ) generator. Efficiency around 30% for the supersonic COIL seemed to be the state-the art in the last decade. Recently, Rosenwaks reported on the achievement of a record (40%) chemical efficiency of the supersonic COIL using a small-scale (5-cm gain length) device with supersonic mixing scheme in 2008. This paper reports on the chemical efficiency of COIL, singlet oxygen generators, optical resonator, and potential application examples.

Principal Author’s Biography: Prof. Fengting Sang, born at Dalian in 1942, graduated from the department of engineering mechanics, Harbin Polytechnic University in 1964, now is an academician of Chinese Academy of Engineering, a senior professor and a supervisor for Ph.D. student in Dalian Institute of Chemical Physics. In the period of more than 40 years from 1962, he has engaged in the research of CO2 gas dynamic laser, HF/DF chemical laser, new species of chemical lasers with visible wavelength, and especially after 1987, chemical oxygen iodine laser (COIL). He has many achievements approved by the Chinese Academy of Sciences (CAS) and the State, including a second-prize of the National Award for Science & Technology Progress, two first-prize and one second-prize of the CAS Awards of Science & Technology Progress, and many first-prize of Provincial-level Awards for Science & Technology Progress. He has published about 70 papers in professional journals, and is the co-author of the following three books written in Chinese: “Chemical Lasers”, “Short-wavelength Chemical Lasers” and “Chemical Lasers & Applications”.

Title: The challenges to the advanced optical manufacturing technology from laser fusion engineering

Prof. Dianyuan Fan (China) Shanghai Institute of Optics and Fine Mechanics CAS Academician of Chinese Academy of Engineering

Abstract: Laser Fusion (ICF) facility is the largest laser system in the world. The facility will require more than 10,000 optics which comprise total surface area of more than 4000m2 . A rigorous and numerous challenges for ultra-precision optical fabrication are all than ever before and to do at unprecedentent speeds as well. The ICF optics difference with conventional optics, has to work under high peak power laser. So that they not only have rigorous form error tolerance (PSD) with difference scale spatial frequency zone also require good subsurface finishing quality . We must develop advanced optical fabrication technology to meet the challenges. In the report, we will briefly describe CNC milling and polishing technique, diamond turning technique for KDP cutting. An accurate metrology ensures successful fabrication, we will present the on-line and subaperture stitching measurements implement the error control effectively in production environment.

Principal Author’s Biography: Fan Dianyuan, research professor of SIOFM,CAS. Postgraduated from the Chinese Academy of Sciences in 1966, and was elected member of the Chinese Academy of Engineering in 1995. During the passed 40 years, he was responsible for designing and completing a series of laser fusion facilities, and has published more than 250 scientific articles and reports.

Title: Advanced Spectroscopy for characterization of materials

Prof. Junhao Chu (China) Shanghai Institute of Technical Physics, CAS Academician of Chinese Academy of Science

Abstract: Some advanced spectroscopic techniques, such as spectroscopic ellipsometry (SE), infrared photo-reflectance (PR) and photo-luminescence (PL), cyclotron resonance (CR) and spin resonance (SR) spectroscopy, and their applications in the characterization of functional materials have been reported in the talk. Some new results on the optical transitions of narrow gap semiconductors and ferroelectric thin film materials were also reported in the talk.

Principal Author’s Biography: He is born at YiXin city in JiangSu province in March 1945, graduated from Physics Department in Shanghai Normal University in 1966, and got Master degree and PhD degree from Shanghai Institute of Technical Physics, CAS in 1981 and 1984, respectively, elected as Member of Chinese Academy of Sciences in 2005. He is professor in Shanghai Institute of Technical Physics in CAS, and Director of Research center for Solar cells in CAS, he is also Dean of School of Information Science and Technology in East China Normal University, and Chief Editor of Chinese Journal of Infrared and Millimeter Waves. He had been the director of National Laboratory for Infrared Physics from 1993 to 2003. He has made a systematically investigation on the infrared opto-electronic materials and devices such as narrow gap semiconductors and ferroelectric thin films. He presented widely used expressions for energy band gap, absorption coefficient etc. for HgCdTe, set up a theoretical model to describe the two-dimensional electron subband structures in the MIS structure of narrow gap semiconductors. He found the properties of fundamental opto-electronic transitions, determined opto-electric territorial for HgCdTe materials and devices. He developed researches on the physics of ferroelectric thin film materials and devices, fabricated PZT and BST uncooled infrared detectors to realize thermal imaging. He has published more than 300 papers, and 3 books. He is also an author for Landolt-Boernstein “Numerical Data and Functional Relationships in Science and Technology”. He acquired the second class Awards of Natural Science in China (2005).

Title: The advance optical technologies of LAMOST telescope

Prof. Xiangqun Cui (China) National Astronomical Observatories/Nanjing Institute of Astronomical Optics and Technology, CAS Academician of Chinese Academy of Science

Abstract: Large Sky Area Multi-Object Fiber Spectroscopic Telescope (LAMOST) is an innovative telescope with both large aperture and wide field of view to achieve the large scale spectroscopic survey observation. LAMOST has completed its engineering work in 2008, and is going to finish commissioning around the end of 2010. It consists of a 5.72m×4.40m active deformable reflecting Schmidt mirror, a 6.67m×6.05m primary mirror and a focal surface with 4000 optical fibers. There are 16 spectrographs to get 4000 spectra which recorded by 32 4KX4K CCD detectors. Both the active deformable reflecting Schmidt mirror and the primary mirror are segmented. This presentation introduces its innovation of optical system, the technique challenges in active optics, mirror fabrication, and the optical fiber positioning. The success show that LAMOST project has pushed the Chinese technologies for developing large telescope to the forefront of world, and let China got capability to build extremely large telescope itself or join international ELT projects.

Keywords: Wide field telescope, Reflecting Schmidt system, Active optics, Segmented mirror

Principal Author’s Biography: Xiangqun Cui is an academician of Chinese Academy of Sciences, the general engineer of LAMOST project, the vice president of Chinese Astronomical Society, the associate director of National Astronomical Observatories of CAS, the associate director of Chinese Center of Antarctic Astronomy. She got her MSC and PhD in Purple Mountain Observatory, CAS in China. During the years of 1985 to 1994 she visited and worked in Jodrell Bank Observatory in England for radio telescopes and in European Southern Observatory (ESO) in Germany for VLT project. In 1994 to 2009, she worked for the Large Sky Area Multi-Object Fiber Spectroscopic Telescope (LAMOST).